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Franklin S468 Wafer Handler

S-468 Wafer Handler

 

Handles 4, 6 and 8 inch wafers.

Rear load cassette design.

Options for 2 and 3 inch wafers.

Elevator with single H-Bar Sensor.

Stage load sensor.

Emergency shutdown switch (EMO).

Center contact end effector.

All digital drive control electronics.

 


Please contact us for more information.


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