t: +44 (0) 23 8064 2571

e:  info@charntec.co.uk

S-28-EX2 Wafer Handler

 

Handles 4, 6 and 8 inch wafers and metric variations.

Rear load cassette design.

Options for 2 and 3 inch wafers.

Elevator with single H-Bar Sensor.

Stage load sensor.

2 Inch extra reach for hand off position.

Emergency shutdown switch (EMO).

Center contact end effector.

All digital drive control electronics.

 


Please contact us for more information.


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