SMMP-468 Wafer Handler
Handles 4, 5, 6 and 8 inch wafers and metric variations.
Front load cassette design.
Guides for easy loading of 6 and 8 inch cassette.
High speed elevator with sensors for 4, 5, 6 and 8 inch cassettes.
Cassette mapper – Detects empty slots and crossed slotted wafers.
Stage load sensorTop side and backside lift mechanism for macro inspection.
Pre align wafers with flats or notch.
Emergency shutdown switch (EMO).
Easy access adjustable leveling feet.
Side and top panel access points.
Center contact end effector.
All digital drive control electronics.