DM-28 Wafer Handler
Handles 2" thru 200mm wafers.
Dual elevator design.
Guides for easy loading of 6 and 8 inch cassette.
High speed elevator with sensors for 2, 3, 4, 5, 6, and 8 inch cassettes.
Cassette mapper – Detects empty slots and crossed slotted wafers.
Stage load sensorEmergency shutdown switch (EMO).
Easy access adjustable leveling feetSide and top panel access points.
Center contact end effector.
All digital drive control electronics.