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Franklin SMLR-28 Wafer Loader

SMLR-28 Wafer Handler


Handles 2" thru 200mm wafers.

Rear load cassette design.

Guides for easy loading of 6 and 8 inch cassette.

High speed elevator with sensors for 2, 3, 4, 5, 6 and 8 inch cassettes.

Cassette mapper – Detects empty slots and crossed slotted wafers.

Stage load sensor.

Loads wafers both directions, left and right.

Emergency shutdown switch (EMO).

Easy access adjustable leveling feet.

Side and top panel access points.

Center contact end effector.

All digital drive control electronics.


Please contact us for more information.

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