SMP-28 Wafer Handler
Handles 2" thru 200mm wafers.
Front load cassette design.
Guides for easy loading of 6 and 8 inch cassette.
High speed elevator with sensors for 2" thru 200mm cassettes.
Cassette mapper – Detects empty slots and crossed slotted wafers.
Stage load sensorPre align wafers with flats or notch.
Emergency shutdown switch (EMO).
Easy access adjustable leveling feet.
Side and top panel access points.
Center contact end effector.
All digital drive control electronics.